1、SEMI PR3 4 0699 SEMI 19991 SEMI PR3 4 0699 PROPOSED SPECIFICATION FOR SURFACE MOUNT INTERFACE OF GAS DISTRIBUTION COMPONENTS B SEAL DESIGN This specification was technically approved by the Global Facilities Committee and is the direct responsibility of the North American Facilities Committee Curren
2、t edition approved by the North American Regional Standards Committee on December 18 1998 Initially available on SEMI OnLine April 1999 to be published June 1999 1 Purpose 1 1This standard in conjunction with the main document establishes thepropertiesandphysical dimensions that define a complete su
3、rface mount interface on the component for the B Seal design 2 Scope 2 1 The scope is identical to the main document except that it is limited to components which will employ a B Seal design for the sealing interface This interface is specifically designed to work with the B Seal 3 Limitations 3 1 T
4、he limitations are detailed in the main document 4 Referenced Documents 4 1 The reference documents are detailed in the main document 5 Terminology 5 1 The terminology is detailed in the main document 6 Ordering Information 6 1 The ordering information is detailed in the main document 7 Requirements
5、 7 1General Components mustmeet all the requirements of the main document 7 2Dimensional Requirements All components other than mass flow controllers meters shall meet the requirements outlined in Figure 1 All mass flow controllers meters shall meet the requirements outlined in Figure 2 Installation
6、 instructions are provided in Figure 3 All geometric dimensioning and tolerancing complies with ASME Y14 5 and or the applicable ISO standard NOTE 1 All dimensions are in millimeters unless otherwise noted NOTE 2 The fitting groove shown in Figure 1 is a mechanical key designed to prevent the compon
7、ent from being incorrectly mounted For all components other than check valves the bigger groove is on the inlet port side and the smaller groove is on the outlet port side 7 3 Sealing Surface Hardness The sealing surface the circular tip of the sealing portion shall have a minimum hardness of 250 Vi
8、ckers Testing shall be done per ISO 6501 NOTE 3 This test will damage the sealing surface and should be considered destructive in nature 7 4 Sealing Surface Roughness The sealing surface the circular tip of the sealing portion shall have a surface roughness of 0 2 micro meters Ra max Testing shall b
9、e done per ISO 4288 NOTE 4 This test may damage the sealing surface and may be destructive in nature 7 5 Sealing Surface Scratches The sealing surface the circular tip of the sealing portion shall not have any lateral scratches which are visible to non magnified normal vision SEMI PR3 4 0699 SEMI 19
10、992 Figure 1 Dimensions of All Components Except MFC MFM SEMI PR3 4 0699 SEMI 19993 Figure 2 Dimensions of All MFC MFM SEMI PR3 4 0699 SEMI 19994 Figure 3 Installation Instructions NOTICE These standards do not purport to address safety issues if any associated with their use It is the responsibilit
11、y of the user of these standards to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any particularapplication Thedeterminat
12、ionofthe suitability of the standard is solely the responsibility of the user Users are cautioned to refer to manufacturer s instructions product labels product data sheets and otherrelevantliteraturerespectinganymaterials mentioned herein These standards are subject to change without notice The use
13、r s attention is called to the possibility that compliance with this standard may require use of copyrighted material or of an invention covered by patent rights By publication of this standard SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection w
14、ith any item mentioned in this standard Users of this standard are expressly advised that determination of any such patent rights or copyrights and the risk of infringement of such rights are entirely their own responsibility Copyright by SEMI Semiconductor Equipment and Materials International 805 East Middlefield Road Mountain View CA 94043 Reproduction of the contents in whole or in part is forbidden without express written consent of SEMI